準(zhǔn)分子激光氣體
序號(hào)迪嘉特氣準(zhǔn)分子激光氣匯總1Mix(混合氣)25-16L-2000psiF2 0.23% + Ar 10.38% + He 64.39% + Ne 25%2Mix(混合氣)62-16L-2000psiF2 0.28% + Ar 8.30% + He 29.22% + Ne 62.2%3Mix(混合氣)10L-2000psiNe 98% + Xe + HCl(低于 0.1%)4Mix(混合氣)16L-2000psiArF 193nm + KrF 248nm + XeCl 308nm + XeF450nm~520nm
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